Preparation of Carbon Films by Hot-Filament-Assisted Sputtering for Field Emission Cathode
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概要
- 論文の詳細を見る
Carbon thin films on a silicon substrate were prepared by DC magnetron sputtering method with a tungsten hot filament. In order to investigate the effects of the hot filament on film properties, the carbon thin films were characterized by X-ray photoelectron spectroscopy (XPS), scanning electron microscope (SEM) and electron emission measurements. The tungsten atoms were evaporated from the hot filament and incorporated in the carbon film. The field emission measurement showed that the incorporation of tungsten was effective in reducing the turn-on voltage. The value of the turn-on voltage was 3.0 V/μm for the sample prepared with a tungsten filament heated at the temperature of 2000°C. The intentional insertion of a tungsten layer between the carbon film and the substrate was effective in obtaining a carbon film with a low turn-on voltage for the field emission.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-01-15
著者
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Abe Katsuya
Department Of Applied Chemistry Faculty Of Engineering Kogakuin University
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KAMIMURA Kiichi
Department of Electric and Electronic Engineering, Faculty of Engineering, Shinshu University
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NAKAO Masato
Department of Electrical and Electronic Engineering, Faculty of Engineering, Shinshu University
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Maezawa Yosuke
Department Of Electrical And Electronic Engineering Shinshu University
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Hayashibe Rinpei
Department of Electrical and Electronic Engineering, Faculty of Engineering, Shinshu University, 4-17-1 Wakasato, Nagano 380-8553, Japan
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Yamakami Tomohiko
Department of Electrical and Electronic Engineering, Shinshu University, 4-17-1 Wakasato, Nagano 380-8553, Japan
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Yamakami Tomohiko
Department of Electrical and Electronic Engineering, Faculty of Engineering, Shinshu University, 4-17-1 Wakasato, Nagano 380-8553, Japan
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Nakao Masato
Department of Electrical and Electronic Engineering, Shinshu University, 4-17-1 Wakasato, Nagano 380-8553, Japan
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Maezawa Yosuke
Department of Electrical and Electronic Engineering, Shinshu University, 4-17-1 Wakasato, Nagano 380-8553, Japan
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