Highly Oriented Crystalline Carbon Thin Films Obtained by DC Magnetron Sputtering with a Hot Filament
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1996-10-15
著者
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KAMIMURA Kiichi
Department of Electric and Electronic Engineering, Faculty of Engineering, Shinshu University
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ONUMA Yoshiharu
Department of Electric and Electronic Engineering, Faculty of Engineering, Shinshu University
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NAKAO Masato
Department of Electrical and Electronic Engineering, Faculty of Engineering, Shinshu University
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Onuma Y
Faculty Of Engineering Shinshu University
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Kamimura K
Faculty Of Engineering Shinshu University
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Kamimura K
Keio Univ. Yokohama Jpn
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NAKAO Masato
Faculty of Engineering, Shinshu University
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KAWAI Yoshifumi
Department of Electrical and Electronic Engineering, Faculty of Engineering, Shinshu University
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Nakao Masato
Faculty Of Engineering Shinshu University
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Kawai Yoshifumi
Department Of Electrical And Electronic Engineering Faculty Of Engineering Shinshu University
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