Thin Carbon Films Obtained by R.F. Plasma Decomposition of Benzene Vapour
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1983-05-20
著者
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Nakao Makoto
Department Of Pediatric Surgery Reproductive And Developmental Medicine Graduate School Of Medical S
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ONUMA Yoshiharu
Department of Electric and Electronic Engineering, Faculty of Engineering, Shinshu University
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Onuma Yoshiharu
Department Of Electrical Engineering Shinshu University
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Kato Yoshitake
Department Of Electrical Engineering Shinshu University
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Kato Yoshitake
Department Of Chemistry University Of Tsukuba
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MATSUSHIMA Hisao
Nagano National College of Technology
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Matsushima Hisao
Nagano Technical College
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Nakao Makoto
Department Of Electrical Engineering Shinshu University
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