Construction of Frequency-Change-Type Single-Crystal Silicon Two-Axis Acceleration Sensor
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概要
- 論文の詳細を見る
The construction of a frequency-change-type single-crystal silicon two-axis acceleration sensor is proposed and is designed using the finite-element method. The sensor element is composed of two developed bending vibrators, a mass and support bars. The volume is about $4.0\times 4.2\times 0.5$ mm3. The 1st out-of-plane vibration mode in the vibrator is used here, and the resonance frequency is about 80 kHz. The analyzed relationship between the applied acceleration and the resonance frequency change becomes linear in this sensor construction. A sensor sensitivity of about 468 ppm/G is realized. When acceleration is applied, the sensor mass moves in parallel along the $x$- and $y$-axes and does not rotate. Therefore, the linearity of sensor sensitivity with respect to the applied acceleration is consistently maintained.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2007-07-30
著者
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Sugawara Sumio
Department Of Electrical Engineering Faculty Of Engineering Yamagata University
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Saito Takashi
Department Of Agronomy Faculty Of Agriculture Tohoku University
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Suzuki Hiroyuki
Department Of Animal Science Faculty Of Agriculture Hokkaido University
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Saito Takashi
Department of Information Technology and Electronics, Faculty of Science and Engineering, Ishinomaki Senshu University, Ishinomaki, Miyagi 986-8580, Japan
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