Application of Frequency-Change-Type Single-Crystal Silicon Acceleration Sensors to Inclination Angle Sensor
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概要
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A new single-crystal silicon inclination sensor using a frequency-change-type acceleration sensor is proposed here. The sensor utilizes the phenomenon showing that the resonance frequency of a bending vibrator changes with axial force. The one-axis sensor element used is composed of one developed bending vibrator, a mass, support bars, and a frame for fixation, and the two-axis sensor element has two vibrators. The volumes of these sensors are about $4.0 \times 4.28 \times 0.5$ and $4.0 \times 4.2 \times 0.5$ mm3, respectively. The first out-of-plane vibration mode in the vibrator is used, and the resonance frequencies of these sensors are about 19.8 and 80.8 kHz, respectively. Acceleration sensors can also be applied to an inclination angle sensor under a gravitational field. The characteristics of the sensors are analyzed using the finite-element method and confirmed experimentally.
- 2008-05-25
著者
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Sugawara Sumio
Department Of Electrical Engineering Faculty Of Engineering Yamagata University
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Terada Jiro
Material & Process Laboratory, Matsushita Electronic Components Co., Ltd., 1006 Kadoma, Kadoma-shi 571-0050, Japan
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Sugawara Sumio
Department of Information Technology and Electronics, Faculty of Science and Engineering, Ishinomaki Senshu University, Ishinomaki, Miyagi 986-8580, Japan
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Watanabe Tokiharu
Department of Information Technology and Electronics, Faculty of Science and Engineering, Ishinomaki Senshu University, Ishinomaki, Miyagi 986-8580, Japan
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