Basic Consideration of a Flat-Type Acceleration Sensor Utilizing the Resonance Frequency Shift in the Flexural Vibrator
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概要
- 論文の詳細を見る
In this paper, a flat-type structure for the acceleration sensor utilizing the resonance frequency shift in the flexural vibrator is proposed, and the design guideline considering the influence of support is clarified by the finite-element analysis. The resonance frequency shift in the vibrator is produced by axial force due to acceleration. The resonance frequency and quality factor are negligibly influenced by adding support and also by adding mass, because the displacements at both ends of the vibrator are very small. The relationship between the acceleration and the resonance frequency change becomes linear. The influence of the undesirable acceleration from other axes is also analyzed. It was clarified that high sensitivity and reduction of the undesirable acceleration are realized by adding mass and by devising a support. This new structure is expected to be a small low-cost crystal sensor that can be fabricated by mass production.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-05-15
著者
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Sugawara Sumio
Faculty Of Engineering Yamagata University
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Takahashi Jun
Faculty Of Human Development University Of Toyama
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Terada Jiro
Material & Process Laboratory, Matsushita Electronic Components Co., Ltd., 1006 Kadoma, Kadoma-shi 571-0050, Japan
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Takahashi Jun
Faculty of Science and Engineering, Ishinomaki Senshu University, 1 Shinmito, Mimamisakai, Ishinomaki-shi 986-8580, Japan
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Sugawara Sumio
Faculty of Science and Engineering, Ishinomaki Senshu University, 1 Shinmito, Mimamisakai, Ishinomaki-shi 986-8580, Japan
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