Growth of KNbO3 Films by Electron-Cyclotron-Resonance-Assisted Pulsed Laser Deposition
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概要
- 論文の詳細を見る
The (110) cut of KNbO3 piezoelectric crystal is suitable for generation of longitudinal waves, because of its high electromechanical coupling factor $k_t$. Epitaxial (110) KNbO3 thin films have been grown on (100) MgO and (100) La-doped SrTiO3 substrates using an electron-cyclotron-resonance-assisted pulsed laser deposition (ECR-PLD) technique. In order to ascertain the effect of the ECR activation of oxygen, the X-ray diffraction pattern of a film grown by ECR-PLD is compared with that of a film grown in an oxygen atmosphere without ECR activation. As a consequence, the ECR-PLD technique is found to be notably effective for epitaxial growth of high-quality KNbO3 films. The in-plane orientation of the films is discussed and it is shown that the macroscopic in-plane structure of KNbO3 films should have a fourfold rotational symmetry. Some films grown on La-doped SrTiO3 have slightly longer (110) spacing than that of (110) orthorhombic KNbO3. This suggests that the films might be (001) tetragonal KNbO3.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-09-15
著者
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Arai Takashi
Department Of Applied Biological Science Faculty Of Science And Technology Science University Of Tok
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Nakamura Kiyoshi
Department Of Chemistry Faculty Of Science Shinshu University
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Ishikawa Kazuo
Department of Electrical and Communication Engineering, Graduate School of Engineering, Tohoku University, Aoba 05, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Ishikawa Kazuo
Department of Biology and Geosciences, Faculty of Science, Shizuoka University
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Ito Shigeo
Department of Electrical and Communication Engineering, Graduate School of Engineering, Tohoku University, Aoba 05, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Arai Takashi
Department of Electrical and Communication Engineering, Graduate School of Engineering, Tohoku University, Aoba 05, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Nakamura Kiyoshi
Department of Electrical and Communication Engineering, Graduate School of Engineering, Tohoku University, Aoba 05, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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NAKAMURA Kiyoshi
Department of Biology, Faculty of Science, Okayama University
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