Improvement of Depth Resolution in Sputter Profiling by Cooling Specimens
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概要
- 論文の詳細を見る
A substantial improvement in the depth resolution of sputter-depth profiles obtained using Auger electron spectroscopy was attained by cooling specimens to nearly liquid-nitrogen temperature during the sputtering process. The effectiveness of this method is illustrated by comparing profiles obtained at different temperatures from the simultaneously prepared Ag/Cu multilayer thin film structures. It is presumed that the effects of the cooling are caused by the suppression of irradiation-induced diffusion and/or of annealing of the more or less amorphized surfaces.
- 社団法人応用物理学会の論文
- 1983-08-20
著者
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Ishikawa Kazuo
Department Of Electronics And Information Engineering Fukui National College Of Technology
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Goto Keisuke
Department Of Applied Physics Osaka University:nagoya Institute Of Technology
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HAMASAKI Sei-ichi
Department of Fine Measurements, Nagoya Institute of Technology
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Ishikawa Kazuo
Department Of Electrical And Communication Engineering Graduate School Of Engineering Tohoku Univers
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Hamasaki Sei-ichi
Department Of Fine Measurements Nagoya Institute Of Technology
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Ishikawa Kazuo
Department of Biology and Geosciences, Faculty of Science, Shizuoka University
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