A Practical System for Measuring Film Thickness by Means of Laser Interference with Laminar-Like Laser
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概要
- 論文の詳細を見る
A practical system for measuring a film thickness based on laser interferometry has been constructed using laminar-like laser and a CCD camera. The system can measure a film thickness at a measuring frequency of 50 Hz, which enables real-time measurement in practical use. The measurable minimum thickness by means of a blue laser having a wavelength of 405 nm was 2.4 μm, and the maximum thickness was 1.2 mm for a film with a refractive index of 1.4. The measurement error of the film thickness due to the spherical aberration of the cylindrical lens was Δh/h=2% at maximum, where h expresses film thickness and Δh its error amount.
- The Laser Society of Japanの論文
- 2004-07-15
著者
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ISHIKAWA Kazuhiko
Department of Geriatric Medicine, Osaka University Graduate School of Medicine
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Zhu Feng
Department Of Information Science Faculty Of Engineering University Of Fukui
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UEDA Masahiro
Department of Obstetrics and Gynecology, Nagoya Red Cross Hospital
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ASADA KATSUHIKO
Department of Electronic Engineering, Faculty of Engineering Osaka University
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IBE Toru
North Tec. Co. Ltd.
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Ishikawa Kazuhiko
Department Of Geriatric Medicine Osaka University Graduate School Of Medicine
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Ishikawa Kazuo
Department Of Electronics And Information Engineering Fukui National College Of Technology
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Ueda Masahiro
Department Of Human Ecology And Technology Faculty Of Education And Regional Studies University Of F
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Asada Katsuhiko
Department Of Information Science Faculty Of Engineering University Of Fukui
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Asada Katsuhiko
Department Of Electronic Engineering Faculty Of Engineering Osaka University
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Ueda Masahiro
Department Of Human Ecology And Technology Faculty Of Education And Regional Studies Fukui Universit
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Ishikawa Kazuhiko
Department Of Electronics And Information Engineering Fukui National College Of Technology
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Ueda Masahiro
Department Of Human Ecology And Technology Faculty Of Education And Regional Studies Fukui Uiniversity
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