Secondary Electron Emission from Diffusion Pump Oils : II.δ-η Analysis for DC-705
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概要
- 論文の詳細を見る
Secondary electron emission (SEE) properties of DC-705 (Trade mark: Dow Corning Chemical Co.), which is a molecular substance, have been studied. Measurements were made on SEE coefficient and on in elastic reflection coefficient for primary energy E_p of 50-2000eV at various thicknesses of DC-705 on a tungsten substrate. The maximum emission depth of inelastically reflected primaries is given as a function of E_p and is proportional to E_p^n(n=2.1±0.3). The maximum emission depth of true secondary electrons is found to be 20-30Å and independent of E_p for E_p higher than 400eV. This value is much smaller than those for other molecular substances found by other workers. The possible causes are discussed. The efficiency of inelastically reflected electrons in producing true secondaries is 3 to 4 times larger than that of direct primaries.
- 社団法人応用物理学会の論文
- 1968-03-05
著者
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Ishikawa Kazuo
Department Of Electronics And Information Engineering Fukui National College Of Technology
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Goto Keisuke
Department Of Fine Measurements Nagoya Institute Of Technology
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Goto Keisuke
Department Of Applied Physics Osaka University:nagoya Institute Of Technology
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Ishikawa Kazuo
Department Of Electrical And Communication Engineering Graduate School Of Engineering Tohoku Univers
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Ishikawa Kazuo
Department Of Fine Measurements Nagoya Institute Of Technology
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Ishikawa Kazuo
Department of Biology and Geosciences, Faculty of Science, Shizuoka University
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