Fabrication of Piezoelectric Thin Film Resonators with Acoustic Quarter-Wave Multilayers
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概要
- 論文の詳細を見る
Expanding electrical communication systems demand new acoustic wave devices that can be used in high frequency ranges. The solidly mounted piezoelectric thin film resonator is a candidate for such devices. In this study, first, acoustic properties of a number of thin films are evaluated and a combination of SiO_2 and ZnO is shown to be suitable for such devices as quarter-wave multilayer materials. Then, piezoelectric thin film resonators consisting of a ZnO piezoelectric film on alternately deposited SiO_2 and ZnO quarter-wave multilayers are designed and fabricated. Their measured characteristics are presented and discussed. [DOI: 10.1143/JJAP.41.3455]
- 社団法人応用物理学会の論文
- 2002-05-30
著者
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KOBAYASHI Hideaki
Department of Materials Science and Processing, Faculty of Engineering, Osaka University
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Ishida Y
Kitakyushu Foundation For The Advancement Of Ind. Sci. And Technol. Kitakyushu Jpn
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NAKAMURA Kiyoshi
Department of Electrical and Communication Engineering, Graduate School of Engineering, Tohoku Unive
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Kuribayashi Hiroki
Corporate R&d Laboratories Pioneer Corporation
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Ishikawa Kazuo
Department Of Electrical And Communication Engineering Graduate School Of Engineering Tohoku Univers
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ISHIDA Yasuaki
Kinseki, Ltd.
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DOI Arata
Kinseki, Ltd.
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Doi A
Kinseki Ltd.
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Nakamura K
Department Of Electrical And Communication Engineering Graduate School Of Engineering Tohoku Univers
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Nakamura Kiyoshi
Department Of Electircal Communications Faculty Of Engineering Tohoku University
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Kobayashi Hideaki
Department Of Electrical And Communication Engineering Graduate School Of Engineering Tohoku Univers
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Ishida Yasuaki
Kinseki Ltd.
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Nakamura Kiyoshi
Department Of Chemistry Faculty Of Science Shinshu University
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Ishikawa Kazuo
Department of Biology and Geosciences, Faculty of Science, Shizuoka University
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NAKAMURA Kiyoshi
Department of Biology, Faculty of Science, Okayama University
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