Analysis of Piezoelectric Thin Film Resonators with Acoustic Quarter-Wave Multilayers
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概要
- 論文の詳細を見る
Two configurations of piezoelectric film resonators with acoustic quarter-wave multilayers, which are promising for use in a very high frequency range from 500 MHz to over 10 GHz, are theoretically analyzed using equivalent circuits and the characteristics of the two configurations are discussed with emphasis on their differences. It has been shown that the number of multilayers required for saturation of $Q$ decreases with an increase in the impedance ratio of multilayers and that the effective electromechanical coupling factor has a certain value independent of the layer number. In the $\lambda/4$ mode configuration, however, the bottom electrode is located at the strain maximum and therefore the resonator charateristics are influenced by the electrode material. The $\lambda/2$ mode configuration appears to be slightly more favorable than the $\lambda/4$ mode configuration.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 2000-05-30
著者
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Kanbara Hirofumi
Department Of Electrical And Communication Engineering Graduate School Of Engineering Tohoku Univers
-
Kobayashi Hideaki
Department Of Electrical And Communication Engineering Graduate School Of Engineering Tohoku Univers
-
Nakamura Kiyoshi
Department Of Chemistry Faculty Of Science Shinshu University
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Kanbara Hirofumi
Department of Electrical and Communication Engineering, Graduate School of Engineering, Tohoku University, Aoba 05, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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NAKAMURA Kiyoshi
Department of Biology, Faculty of Science, Okayama University
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