Epitaxial Growth of ZnO Films on (0001) Sapphire at Low Temperatures by Electron Cyclotron Resonance-assisted Molecular Beam Epitaxy and Their Microstructural Characterizations
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概要
- 論文の詳細を見る
The details of epitaxial growth and microstructural characteristics of ZnO films grown on (0001) sapphire were investigated using X-ray diffraction (XRD), reflection high energy electron diffraction (RHEED), and plan-view and cross-sectional transmission electron microscopy (TEM). The films were grown by electron cyclotron resonance-assisted molecular beam epitaxy (ECR-assisted MBE). The ECR-assisted MBE was found to be capable of growing high quality epitaxial ZnO films at low temperatures in comparison with chemical vapor deposition (CVD) and RF sputtering. The films exhibited a high degree of epitaxy, a sharp interface between film and substrate, and a smooth surface morphology. The TEM observations revealed that the films were epitaxial with an orientational relationship of (0001)ZnO ‖ (0001)Al_2O_3 and [1^^-21^^-0]ZnO ‖ [1^^-100]Al_2O_3. This is equivalent to a 30°rotation of ZnO relative to sapphire in (0001) plane.
- 社団法人応用物理学会の論文
- 1998-03-15
著者
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SHINDO Daisuke
Institute of Multidisciplinary Research for Advanced Materials, Tohoku University
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Lim S‐h
Tohoku Univ. Sendai Jpn
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Shindo Daisuke
Institute For Advanced Materials Processing Tohoku University
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NAKAMURA Kiyoshi
Department of Electrical and Communication Engineering, Graduate School of Engineering, Tohoku Unive
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KANG Hee-Bog
Department of Electrical and Communication Engineering, Graduate School of Engineering, Tohoku Unive
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Kang H‐b
Tohoku Univ. Sendai Jpn
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Kang Hee-bog
Department Of Electrical And Communication Engineering Graduate School Of Engineering Tohoku Univers
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LIM Sung-Hwan
Institute for Advanced Materials Processing, Tohoku University
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Lim Sung-hwan
Institute For Advanced Materials Processing Tohoku University
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Shindo Daisuke
Institiute For Advanced Materials Processing Tohoku University
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Nakamura Kiyoshi
Department Of Electircal Communications Faculty Of Engineering Tohoku University
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Nakamura Kiyoshi
Department Of Electrical And Communications Graduate School Of Engineering Tohoku University
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Nakamura Kiyoshi
Department Of Chemistry Faculty Of Science Shinshu University
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NAKAMURA Kiyoshi
Department of Biology, Faculty of Science, Okayama University
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