Micropatterned 1-Alkene Self-Assembled Monolayer on Hydrogen-Terminated Silicon by Vacuum Ultraviolet Lithography
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概要
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We fabricated micropatterned 1-alkene self-assembled monolayers (SAMs) on p-type Si(111). 1-Alkene SAMs were prepared from 1-hexadecene (HD) and 1-octadecene (OD) through reduced pressure chemical vapor deposition. Those SAMs were micropatterned by vacuum ultraviolet (VUV) light lithography. The 1-alkene SAMs irradiated for 30 min were measured by X-ray photoelectron spectroscopy (XPS). The sample surface irradiated for 30 min was covered with shorter alkyl chains with carboxyl end groups on SiOx since the O and OH radicals produced by VUV irradiation react with alkyl chains. We measured surface potential images of those micro-patterned SAMs with Kelvin probe force microscopy (KPFM). The surface potentials of HD- and OD-SAMs were +60 and +90 mV against irradiated regions. The regions of 1-alkene SAMs show higher surface potential than those of irradiated regions due to the presence of carboxyl end groups. The regions of HD- and OD-SAMs showed positive surface potentials against those of irradiated regions. This irradiated region was confirmed to be a carboxyl-terminated surface with short alkyl chains based on XPS analysis. The carboxyl groups are negatively charged, so the surface potential of the irradiated regions is negative against the HD- and OD-SAM regions.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-04-15
著者
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Takai Osamu
Center For Integrated Research In Science And Engineering Nagoya University
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Saito Nagahiro
Department Of Materials Processing And Engineering Graduate School Of Engineering Nagoya University
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Kadoya Yutaka
Department Of Materials Processing Engineering Graduate School Of Engineering Nagoya University
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Hayashi Kazuyuki
Department Of Biopharmaceutics Graduate School Of Pharmaceutical Sciences Osaka University
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Sugimura Hiroyuki
Department Of Cardiology & Vascular Disease Dokkyo Medical University Nikko Medical Center
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Saito Nagahiro
Department of Materials Processing Engineering, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa, Nagoya 464-8603, Japan
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Sugimura Hiroyuki
Department of Materials Science and Engineering, Kyoto University, Kyoto 606-8501, Japan
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Sugimura Hiroyuki
Department of Materials Processing Engineering, Graduate School of Engineering, Nagoya University, Chikusaku, Nagoya 464-8603, Japan
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Sugimura Hiroyuki
Department of Materials Science and Engineering, Kyoto University, Yoshida-Hon'machi, Sakyo, Kyoto 606-8501, Japan
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Sugimura Hiroyuki
Department of Materials Processing Engineering, Graduate School of Engineering, Nagoya University, Chikusa, Nagoya 464-8603, Japan
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