Analysis of Atomic Force Curve Data for Mapping of Surface Properties in Water
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概要
- 論文の詳細を見る
This paper presents an analysis of atomic force versus distance curves for a silicon nitride probe and a silicon sample immersed in water. A custom-built atomic force microscope (AFM) was adapted for working in water by building a water cell from a liquid drop caught between a glass lamella fixed on the top of the cantilever base and the sample surface. An algorithm for processing of force curve data for long- and short-range forces is described. The force curve data taken for a sample consisting of a silicon wafer Si(111) patterned with V-shaped grooves and a silicon nitride cantilever in water were digitally acquired and automatically processed for mapping of surface properties. A weak repulsive double layer force with no relevant dependence on sample topography was observed on the force curves taken during approach movement of the cantilever. On the other hand, the attractive hydration force showed a strong dependence on the sample topography. Large hydration force values were noticed on the inclined faces of the V-shaped grooves while small hydration force values were noticed outside the grooves. The result was explained by the dependence of the tip curvature radius at the contact region on the tilt of the sample surface.
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 2001-03-15
著者
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Sirghi Lucel
Graduate School Of Engineering Nagoya University
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NAKAGIRI Nobuyuki
Nikon Corporation
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SUGIMURA Hiroyuki
Graduate School of Engineering, Nagoya University
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Takai Osamu
Graduate School Of Engineering Nagoya University
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Sugimura Hiroyuki
Department of Materials Science and Engineering, Kyoto University, Kyoto 606-8501, Japan
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Sugimura Hiroyuki
Graduate School of Engineering, Nagoya University, Chikusa, Nagoya 464-8603, Japan
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Sugimura Hiroyuki
Department of Materials Processing Engineering, Graduate School of Engineering, Nagoya University, Chikusaku, Nagoya 464-8603, Japan
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Sugimura Hiroyuki
Department of Materials Science and Engineering, Kyoto University, Yoshida-Hon'machi, Sakyo, Kyoto 606-8501, Japan
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Sirghi Lucel
Graduate School of Engineering, Nagoya University, Chikusa, Nagoya 464-8603, Japan
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Nakagiri Nobuyuki
Nikon Corporation, 1-6-3 Nishi-Ohi, Shinagawa, Tokyo 140-8601, Japan
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Sugimura Hiroyuki
Department of Materials Processing Engineering, Graduate School of Engineering, Nagoya University, Chikusa, Nagoya 464-8603, Japan
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