Lead-Free Piezoelectric (K,Na)NbO3 Thin Films Derived from Metal Alkoxide Precursors
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概要
- 論文の詳細を見る
Lead-free piezoelectric K0.5Na0.5NbO3 thin films for microelectromechanical systems were fabricated via chemical solution process using metal alkoxide. Perovskite K0.5Na0.5NbO3 (KNN) single-phase thin films with good leakage current properties were successfully prepared by optimizing the KxNaxNbO3 ($x\geqq 0.5$) composition of the precursor solution. The KNN thin films prepared from the solution with K0.55Na0.55NbO3 composition showed typical ferroelectric $P$–$E$ hysteresis and field-induced strain loops. The $2P_{\text{r}}$ and $2E_{\text{c}}$ values of the K0.55Na0.55NbO3 films were 14 μC/cm2 and 140 kV/cm, respectively. From the slope of the field-induced butterfly loop, the effective $d_{33}$ was found to be 46 pm/V.
- Japan Society of Applied Physicsの論文
- 2007-04-25
著者
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Yogo Toshinobu
Division Of Nanomaterials Science Ecotopia Science Institute Nagoya University
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Sakamoto Wataru
Division Of Applied Biosciences Graduate School Of Agriculture Kyoto University
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SHIMURA Tetsuo
Division of Nanomaterials Science, EcoTopia Science Institute, Nagoya University
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Nakashima Yoshifumi
Division Of Pharmacology Drug Safety And Metabolism Olsuka Pharmaceutical Factory Inc.
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Maiwa Hiroshi
Department of Materials Science and Engineering, Shonan Institute of Technology, 1-1-25 Tsujido-Nishikaigan, Fujisawa, Kanagawa 251-8511, Japan
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Maiwa Hiroshi
Department of Human and Environmental Science, Shonan Institute of Technology, 1-1-25 Tsujido Nishikaigan, Fujisawa, Kanagawa 251-8511, Japan
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Nakashima Yoshifumi
Division of Nanomaterials Science, EcoTopia Science Institute, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
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Sakamoto Wataru
Division of Nanomaterials Science, EcoTopia Science Institute, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
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