Dielectric Properties of (Pb, La)TiO_3 Thin Films by Multiple-Cathode Sputtering and Its Application to Dynamic Random Access Memory Capacitors
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1996-09-30
著者
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眞岩 宏司
湘南工科大学工学部
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Ichinose Noboru
Department Of Materials Science And Engineering School Of Science And Engineering Waseda University
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MAIWA Hiroshi
Department of Materials Science and Engineering, Shonan Institute of Technology
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Maiwa Hiroshi
Department of Human and Environmental Science, Shonan Institute of Technology, 1-1-25 Tsujido Nishikaigan, Fujisawa, Kanagawa 251-8511, Japan
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