Preparation and Properties of (Ba,Sr)TiO_3 Thin Films by RF Magnetron Sputtering
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概要
- 論文の詳細を見る
This paper describes the properties of (Ba_<0.5>Sr_<0.5>)TiO_3 thin films prepared on Pd(100)/MgO(100) substrate using the rf magnetron sputtering technique. Perovskite-type thin films were prepared at a gas pressure of 7mTorr, and the crystal orientations of thin films changed depending on the substrate temperature. The dielectric constant increased with increasing substrate temperature, and the maximum value 〜300 was obtained at 550℃.
- 社団法人応用物理学会の論文
- 1993-09-30
著者
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Ichinose Noboru
Department Of Materials Science And Engineering School Of Science And Engineering Waseda University
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OGIWARA Takashi
Department of Materials Science and Engineering, School of Science and Engineering, Waseda Universit
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Ogiwara T
Waseda Univ. Tokyo Jpn
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Ogiwara Takashi
Department Of Materials Science And Engineering School Of Science And Engineering Waseda University
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