Fatigue Characteristics of SrBi_2Ta_2O_9 Thin Films by RF Magnetron Sputtering Method
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概要
- 論文の詳細を見る
Ferroelectric SrBi_2Ta_2O_9 thin films were synthesized on various substrates, such as MgO(100), glass, Pd/MgO(100) and Pd/glass by the rf magnetron sputtering method. Single-phase thin films were prepared on these substrates using a target with the starting chemical composition of SrCO_3:Bi_2O_3:Ta_2O_5=0.7:1.2:1. At the higher substrate temperature of 1073 K, (h 0 l) orientation was found. The hysteresis loop of the thin film on Pd(100)/MgO(100) substrate did not change up to 10^9 switching cycles. These properties are very attractive for nonvolatile memory application.
- 社団法人応用物理学会の論文
- 1997-09-30
著者
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Ichinose Noboru
Department Of Materials Science And Engineering School Of Science And Engineering Waseda University
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Ichinose Noboru
Department Of Materials Science And Engineering Waseda University
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Watanabe Masaru
Department Of Cosmosciences Hokkaido University
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Watanabe Masaru
Department Of Materials Science And Engineering Waseda University
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Watanabe Masaru
Department Of Chemical Engineering Tohoku University
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