金属蒸着膜の電気抵抗の時間変化

概要

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The electric resistance of a gold evaporated film is measured as a function of time.<BR>Gold is deposited onto fused quartz substrates (2 cm × 2 cm × 3 mm) from a tungsten conical basket The thickness of the film is 140A for all specimens. The temperature of the substrate is kept at room temperature (20°C). Constant current flows through the films from a current stabilizer and the resistance is measured by automatic voltage recorder. The resistance is found to decrease with time abruptly just after the evaporation. If the variation of the resistance with time (decay) could be considered to correspond to the chemical reaction, the order of it becomes about 6.0. This value is mostly independent of the evaporation rate. It is supposed that the decay represents the ordering of the crystal disorders in films and is mainly occurs in the grain boundaries among the crystallites.
日本真空協会の論文