Al-Doped ZnO Films Deposited by Reactive Magnetron Sputtering in Mid-Frequency Mode with Dual Cathodes
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-02-15
著者
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重里 有三
青学大理工
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SHIGESATO Yuzo
College of Science and Engineering, Aoyama Gakuin University
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Shigesato Yuzo
Institute Of Industrial Science University Of Tokyo
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Shigesato Yuzo
College Of Science And Engineering Aoyama Gakuin University
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Shigesato Yuzo
College Of Science And Engineering Aoyamagakuin University
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Shigesato Yuzo
Institute On Industrial Science University Of Tokyo
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Song P
Aoyama Gakuin Univ. Kanagawa Jpn
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Song Pung
College Of Science And Engineering Aoyama Gakuin University
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Shigesato Yuzo
Department Of Chemistry Aoyama Gakuin University
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Mizukami Akio
Nissin-seiki Co. Ltd.
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Suzuki K
Surftech Transnational Co. Ltd.
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Kon Masato
College Of Science And Engineering Aoyama Gakuin University
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FRACHI Peter
Fraunhofer Institute Elektronenstrahl- und Plasmatechnik
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SUZUKI Koichi
SurfTech Transnational Co., Ltd.
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