Crystallinity of Gallium-Doped Zinc Oxide Films Deposited by DC Magnetron Sputtering Using Ar, Ne or Kr Gas
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-10-15
著者
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重里 有三
青学大理工
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SHIGESATO Yuzo
College of Science and Engineering, Aoyama Gakuin University
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Shigesato Yuzo
Institute Of Industrial Science University Of Tokyo
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Shigesato Yuzo
College Of Science And Engineering Aoyamagakuin University
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Shigesato Yuzo
Institute On Industrial Science University Of Tokyo
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Shigesato Yuzo
Department of Chemistry, College of Science and Engineering, Aoyama University
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Song P
Aoyama Gakuin Univ. Kanagawa Jpn
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Shigesato Yuzo
Department Of Chemistry Aoyama Gakuin University
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Mizukami Akio
Nissin-seiki Co. Ltd.
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Kon Masato
College Of Science And Engineering Aoyama Gakuin University
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SONG Pung
Department of Chemical Engineering, Chungnam National University
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KON Masato
Department of Chemistry, College of Science and Engineering, Aoyama Gakuin University
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MITSUI Akira
Research Center, Asahi Glass Co., Ltd.
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MITSUI Akira
Research Center, Ajinomoto Pharmaceuticals
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