Thermochromic VO_2 Films Deposited by RF Magnetron Sputtering Using V_2O_3 or V_2O_5 Targets

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2000-10-15

著者

• SHIGESATO Yuzo

  College of Science and Engineering, Aoyama Gakuin University

• Shigesato Yuzo

  College Of Science And Engineering Aoyama Gakuin University

• Odaka Hidehumi

  Research Center Asahi Glass Co. Ltd.

• ENOMOTO Mikiko

  College of Science and Engineering, Aoyama Gakuin University

• Enomoto Mikiko

  College Of Science And Engineering Aoyama Gakuin University

関連論文

• サーモリフレクタンス法によるTiN_x薄膜の熱拡散率の測定
• 透明導電膜の基礎と応用 (特集 エレクトロニック・フィールド)
• AlドープZnO透明導電膜の反応性スパッタリングによる高速成膜
• ITO,IZO薄膜の作製方法と構造・物性
• スマートウインドウ : 賢い窓ガラス
• Thermochromic VO2 Films Deposited by RF Magnetron Sputtering Using V2O3 or V2O5 Targets
• Early stages of ITO deposition on polymer substrate
• オゾン添加反応性直流マグネトロンスパッタによるITOの成膜 (高機能性を有する無機薄膜材料)
• 研究プロジェクト概要 (高機能性を有する無機薄膜材料)
• 透明性を活かすためのコーティング
• スパッタ法による高性能性セラミックス薄膜の形成 (特集 コ-ティング)
• 透明導電膜の構造制御
• 透明導電膜としての酸化亜鉛 (特集 多様な電子機能をもつ酸化亜鉛の新展開)
• Effect of Sn Doping on the Crystal Growth of Indium Oxide Films
• Deposition of Heteroepitaxial In_2O_3 Thin Films by Molecular Beam Epitaxy
• Characterization of RF-Enhanced DC Sputtering to Deposit Tin-Doped Indium Oxide Thin Films
• スパッタ法による高活性酸化チタン光触媒の成膜 (特集 酸化チタン光触媒の実用技術最前線) -- (光触媒膜作製技術)
• Preparation and Crystallization of Tin-doped and Undoped Amorphous Indium Oxide Films Deposited by Sputtering
• Electrical and Structural Properties of Tin-Doped Indium Oxide Films Deposited by DC Sputtering at Room Temperature
• Study on Electronic Structure and Optoelectronic Properties of Indium Oxide by First-Principles Calculations
• In Situ Observation of Adsorbed Heptylviologen Cation Radicals by Slab Optical Waveguide Spectroscopy Utilizing Indium-tin-oxide Electrode
• GaN Films Deposited by DC Reactive Magnetron Sputtering
• Donor Compensation and Carrier-Transport Mechanisms in Tin-doped In_2O_3 Films Studied by Means of Conversion Electron ^Sn Mossbauer Spectroscopy and Hall Effect Measurements
• Doping Mechanisms of Sn in In_2O_3 Powder Studied Using ^Sn Mossbauer Spectroscopy and X-Ray Diffraction
• Al-Doped ZnO Films Deposited by Reactive Magnetron Sputtering in Mid-Frequency Mode with Dual Cathodes
• Photoinduced Hydrophilicity of Epitaxially Grown TiO_2 Films by RF Magnetron Sputtering
• Crystallinity of Gallium-Doped Zinc Oxide Films Deposited by DC Magnetron Sputtering Using Ar, Ne or Kr Gas
• Electronic Structure Analyses of Sn-doped In_2O_3
• Impedance Control of Reactive Sputtering Process in Mid-Frequency Mode with Dual Cathodes to Deposit Al-Doped ZnO Films
• Thermochromic VO_2 Films Deposited by RF Magnetron Sputtering Using V_2O_3 or V_2O_5 Targets
• Study on Thermochromic VO2 Films Grown on ZnO-Coated Glass Substrates for “Smart Windows”
• Impedance Control of Reactive Sputtering Process in Mid-Frequency Mode with Dual Cathodes to Deposit Al-Doped ZnO Films
• GaN Films Deposited by DC Reactive Magnetron Sputtering
• Deposition of Heteroepitaxial In2O3 Thin Films by Molecular Beam Epitaxy
• Characterization of RF-Enhanced DC Sputtering to Deposit Tin-Doped Indium Oxide Thin Films

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