Effect of Substrate Temperature on Properties of Indium–Tin-Oxide Films Deposited on Poly(ethylene terephthalate) Substrate by DC Magnetron Sputtering
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概要
- 論文の詳細を見る
Indium–tin-oxide (ITO) films were successfully deposited on poly(ethylene terephthalate) (PET) substrates at various temperatures by DC magnetron sputtering. The influence of the substrate temperature on the electrical, structural, mechanical and optical properties and surface morphology was investigated. The optimum electrical, optical and mechanical properties were obtained for the films deposited at a substrate temperature of 70 °C, which was attributed to the enhancement of the surface migration of the sputtered atoms arriving at the substrate surface. On the other hand, the average roughness was increased due to the structural change from amorphous to polycrystalline. However, the electrical and mechanical properties of the films were degraded at temperatures higher than 70 °C. This result could be due to the thermal damage incurred by the PET substrate during the sputtering process.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2009-05-25
著者
-
SONG Pung
Department of Chemical Engineering, Chungnam National University
-
Lee Dong
Department Of Aerospace Engineering Chonbuk National University
-
Lee Gun
Surface Technology Research Center, Korea Institute of Materials Science (KIMS), 66 Sangnam-dong, Changwon, Gyeongnam 641-010, Korea
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