Effects of Annealing on Tantalum Pentoxide Films in N_2 and N_2O Gas Environments : Surfaces, Interfaces, and Films

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2001-08-15

著者

• Wang Y‐h

  National Cheng‐kung Univ. Tainan Twn

• Horng Jui-hong

  Department Of Mechanical And Marine Engineering National Taiwan Ocean University

• Wang Yeong-her

  Institute Of Microelectronics Department Of Electrical Engineering National Cheng Kung University

• Houng M‐p

  National Cheng‐kung Univ. Tainan Twn

• Houng Mau-phon

  Institute Of Microelectronics Department Of Electrical Engineering National Cheng Kung University

• HUANG Rui-Chang

  Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University

• Huang Rui-chang

  Institute Of Microelectronics Department Of Electrical Engineering National Cheng Kung University

関連論文

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• Trap Concentration Dependence on the Electrical Properties of Annealed Ultrathin Fluorinated Silicon Oxides
• Fourier Transform Infrared Characterization of Moisture Absorption in SiOF Film
• Effect of Fluorine Concentration on the Metal-Insulator-Semiconductor (MIS) Solar Cell Output Performance by Liquid Phase Deposition
• Near Room-Temperature Growth of SiO_2 Films for p-HgCdTe Passivation by Liquid Phase Deposition
• GaAs Metal-Oxide-Semiconductor Field Effect Transistors Fabricated with Low-Temperature Liquid-Phase-Deposited SiO_2
• A Novel Microwave Microstrip Surface Acoustic Wave Filter with Gigahertz Band Low-Loss Wide Bandwidth for Broad Spectrum Communication System
• Effects of Annealing on Tantalum Pentoxide Films in N_2 and N_2O Gas Environments : Surfaces, Interfaces, and Films
• AlGaN/GaN Metal Oxide Semiconductor Heterostructure Field-Effect Transistor Based on a Liquid Phase Deposited Oxide : Semiconductors
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• Surface Oxidation Kinetics of GaAs Oxide Growth by Liquid Phase Chemical-Enhanced Technique
• Investigation of Low-Temperature Deposition of Silicon Dioxide on Indium Phosphide by Liquid Phase Deposition
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• Near-Room-Temperature Selective Oxidation on GaAs Using Photoresist as a Mask
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• Dual-Mode Ring Bandpass Filter Using Defected Ground Structure with a Wider Stopband(Microwaves, Millimeter-Waves)
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• Formation of Selective High Barrier Region by Inductively Coupled Plasma Treatment on GaN-Based Light-Emitting Diodes
• Light Output Enhancement of AlGaInP Light Emitting Diodes with Nanopores of Anodic Alumina
• High Capacitance Density in a Ta_2O_5 Folded Capacitor Chip
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• Microstructures and Microwave Dielectric Properties of ($1-x$)MgO$\cdot$$x$BaO$\cdot$TiO2 Ceramics
• Liquid Phase Chemical Enhanced Oxidation on AlGaAs and Its Application
• Role of Annealing in Constant Period of Voltage Stress on the Burn-in Effect Suppression of InGaP/GaAs Heterojunction Bipolar Transistors
• Direct Growth of High-Quality InP Layers on GaAs Substrates at Low Temperature by Metalorganic Vapor Phase Epitaxy
• Investigation of Novel Microwave Surface-Acoustic-Wave Filter on Different Piezoelectric Substrates
• Effects of Annealing on Tantalum Pentoxide Films in N2 and N2O Gas Environments

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