Investigation of Low-Temperature Deposition of Silicon Dioxide on Indium Phosphide by Liquid Phase Deposition

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1999-10-15

著者

• Wang Na-fu

  Department Of Electrical Engineering National Cheng-kung University

• Wang Y‐h

  National Cheng‐kung Univ. Tainan Twn

• WANG Yeong-Her

  Department of Electrical Engineering, National Cheng Kung University

• Wang Yeong-her

  Department Of Electrical Engineering National Cheng Kung University

• Houng M‐p

  National Cheng‐kung Univ. Tainan Twn

• HOUNG Mau-Phon

  Department of Electrical Engineering, National Cheng-Kung University

• Houng Mau-phon

  Department Of Electrical Engineering National Cheng Kung University

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• Surface Oxidation Kinetics of GaAs Oxide Growth by Liquid Phase Chemical-Enhanced Technique
• Investigation of Low-Temperature Deposition of Silicon Dioxide on Indium Phosphide by Liquid Phase Deposition
• CO_2 Laser Annealing on Fluorinated Silicon Oxide Films
• Near-Room-Temperature Selective Oxidation on GaAs Using Photoresist as a Mask
• Liquid Phase Chemical-Enhanced Oxidation for GaAs Operated Near Room Temperature
• Low-Temperature Sintering of Microwave Dielectrics (Zn,Mg)TiO3
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• Multilayer Stepped-Impedance Resonator Band-Pass Filter Implementing Using Low Temperature Cofired Ceramic Structure
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• Trap Concentration Dependence on the Electrical Properties of Annealed Ultrathin Fluorinated Silicon Oxides
• CO2 Laser Annealing on Fluorinated Silicon Oxide Films

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