Trap Concentration Dependence on the Electrical Properties of Annealed Ultrathin Fluorinated Silicon Oxides

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概要

• 論文の詳細を見る
• Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
• 2001-03-01

著者

• Chang Woo-jin

  Microwave Devices Team Etri

• Chang Wai-jyh

  Department Of Electrical Engineering National Cheng-kung University

• Wang Y‐h

  National Cheng‐kung Univ. Tainan Twn

• WANG Yeong-Her

  Department of Electrical Engineering, National Cheng Kung University

• Wang Yeong-her

  Department Of Electrical Engineering National Cheng Kung University

• Houng M‐p

  National Cheng‐kung Univ. Tainan Twn

• HOUNG Mau-Phon

  Department of Electrical Engineering, National Cheng-Kung University

• Houng Mau-phon

  Department Of Electrical Engineering National Cheng Kung University

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