Investigation of Novel Microwave Surface-Acoustic-Wave Filter on Different Piezoelectric Substrates

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概要

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• A novel GHz-band low-loss large-bandwidth microwave microstrip, surface-acoustic-wave (SAW) filter used in spread spectrum communication systems was designed and fabricated. The 16 μm input/output-interdigital-transducer (IDT) LiNbO3 61.00 MHz SAW filter, with microwave square open-loop resonators, has an insertion loss of $-3.987$ dB. This device can also be used as a 1.064 GHz microwave microstrip SAW filter with four cross-coupled microstrip square open-loop resonators and two planar interdigital capacitors. It was found that this novel device has an insertion loss ($S_{21}$) of $-2.962$ dB, a reflection loss ($S_{11}$) of $-25.497$ dB and a 3 dB bandwidth of 800 MHz. The characteristics of these low-loss large-bandwidth ($\textit{BW}=80$%) microwave microstrip SAW filters are influenced by the interaction between electromagnetic waves and piezoelectric SAWs. To confirm this claim, devices of identical design were fabricated on the three types of substrate: i) 128°-rotated YX-cut lithium niobate (LiNbO3) with a high electromechanical coupling coefficient ($K^{2}=5.3$%), ii) GaAs S-I photo-piezoelectric material with a low electromechanical coupling coefficient ($K^{2}=0.07$%) and iii) non-piezoelectric SiO2/Si material with a thickness of 9000 Å. The performances of these devices were significantly different. We will apply the principle of SAWs and the equivalent circuit of IDT to prove our experimental results.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2004-12-15

著者

• Wang Na-fu

  Department Of Electrical Engineering National Cheng-kung University

• Tang I-tseng

  Institute Of Microelectronics Department Of Electrical Engineering National Cheng Kung University

• Houng Mau-phon

  Institute Of Microelectronics Department Of Electrical Engineering National Cheng Kung University

• Hung Chen-i

  Department Of Mechanical Engineering National Cheng-kung University

• Wang Na-Fu

  Department of Electronic Engineering, Cheng Shiu University, No. 840, Chengcing Rd., Niaosong Township, Kaohsiung County 83305, Taiwan, R.O.C.

• Houng Mau-Phon

  Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University, 1 University Road, Tainan, Taiwan 701, R.O.C.

• Tang I-Tseng

  Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University, 1 University Road, Tainan, Taiwan 701, R.O.C.

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