Formation of Selective High Barrier Region by Inductively Coupled Plasma Treatment on GaN-Based Light-Emitting Diodes

スポンサーリンク

概要

• 論文の詳細を見る

• By inductively coupled plasma (ICP) etching, a selective high barrier region (SHBR) was fabricated below the p-pad metal electrode for modifying the injection current distribution on p-type GaN of GaN-based light-emitting diodes (LEDs). Through the analysis of current noise power spectra, the samples with ICP etching treatment have excess nitrogen vacancies at the selectively etched surface of p-type GaN; thus, they have a lower hole concentration than the as-grown sample, resulting in a larger barrier height for carrier transport. With this SHBR, the light-output power for the LED chip measured at 20 mA was significantly increased by 12% as compared with that for the conventional LED chip. The light-output power increase could be attributed to a relative reduction in optical power absorption under the p-pad electrode and a higher density of current effectively injected into the active layer of the LED by the SHBR structure.

• 2010-11-25

著者

• Houng Mau-phon

  Institute Of Microelectronics Department Of Electrical Engineering National Cheng Kung University

• Hung Chen-i

  Department Of Mechanical Engineering National Cheng-kung University

• Kuo Ting-Wei

  Institute of Microelectronics, Department of Electrical Engineering, National Cheng-Kung University, Tainan 701, Taiwan, R.O.C.

• Lin Shi-Xiong

  Institute of Microelectronics, Department of Electrical Engineering, National Cheng-Kung University, Tainan 701, Taiwan, R.O.C.

• Hung Pin-Kun

  Institute of Microelectronics, Department of Electrical Engineering, National Cheng-Kung University, Tainan 701, Taiwan, R.O.C.

• Chong Kwok-Keung

  Department of Microelectronics Engineering, National Kaohsiung Marine University, Kaoshiung 811, Taiwan, R.O.C.

• Chong Kwok-Keung

  Department of Microelectronic Engineering, National Kaoshiung Marine University, 142 Hai-Chuan Road, Nan-Tzu, Kaohsiung 811, Taiwan

• Houng Mau-Phon

  Institute of Microelectronics, Department of Electrical Engineering, National Cheng-Kung University, Tainan 701, Taiwan, R.O.C.

• Hung Chen-I

  Department of Mechanical Engineering, National Cheng-Kung University, Tainan 701, Taiwan, R.O.C.

関連論文

• A Novel Microwave Microstrip Surface Acoustic Wave Filter with Gigahertz Band Low-Loss Wide Bandwidth for Broad Spectrum Communication System
• Effects of Annealing on Tantalum Pentoxide Films in N_2 and N_2O Gas Environments : Surfaces, Interfaces, and Films
• Very High Selective Etching of GaAs/Al0.2Ga0.8As for Gate Recess Process to Pseudomorphic High Electron Mobility Transistors (PHEMT) Applications Using Citric Buffer Solution
• Dual-Mode Ring Bandpass Filter Using Defected Ground Structure with a Wider Stopband(Microwaves, Millimeter-Waves)
• High Spurious Suppression of the Dual-Mode Patch Bandpass Filter Using Defected Ground Structure(Microwaves, Millimeter-Waves)
• Design and Flow Simulation of a New Micromixer(Experimental Mechanics in Heat and Fluid Flow)
• Formation of Selective High Barrier Region by Inductively Coupled Plasma Treatment on GaN-Based Light-Emitting Diodes
• Light Output Enhancement of AlGaInP Light Emitting Diodes with Nanopores of Anodic Alumina
• High Capacitance Density in a Ta_2O_5 Folded Capacitor Chip
• TiN Enhancement of Output Performance for Light-Emitting Diodes under High Injection Current
• Microstructures and Microwave Dielectric Properties of ($1-x$)MgO$\cdot$$x$BaO$\cdot$TiO2 Ceramics
• Liquid Phase Chemical Enhanced Oxidation on AlGaAs and Its Application
• Role of Annealing in Constant Period of Voltage Stress on the Burn-in Effect Suppression of InGaP/GaAs Heterojunction Bipolar Transistors
• Investigation of Novel Microwave Surface-Acoustic-Wave Filter on Different Piezoelectric Substrates
• Simulation of Charged Ion Migration in Capillary Zone Electrophoresis System Using Particle in Cell Method
• Effects of Annealing on Tantalum Pentoxide Films in N2 and N2O Gas Environments
• Effect of Irreversibilities on the Performance of Thermoelectric Generator Investigated Using Exergy Analysis
• Arc Effect on Charged Ion Migration in Capillary Zone Electrophoresis Using Hybrid Finite Element and Particle-in-Cell Method

もっと見る 閉じる

スポンサーリンク