Very High Selective Etching of GaAs/Al0.2Ga0.8As for Gate Recess Process to Pseudomorphic High Electron Mobility Transistors (PHEMT) Applications Using Citric Buffer Solution

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概要

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• Highly selective wet etching of GaAs on Al0.2Ga0.8As can be realized using citric buffer (citric acid/H2O2/H2O) solutions. The selectivity can be up to 256, which is distinct from the previous non-selectivity inference, due to consulting the role of H2O2 in this etching system. The etch stop mechanism is demonstrated by X-ray photoelectron spectroscopy (XPS) and indicates the formation of dense oxide Al2O3 on Al0.2Ga0.8As to stop etching. The applications to pseudomorphic high electron mobility transistors (PHEMT) gate recess processes, no obvious drain current decrease can be perceived even after 8 min overetching. The etched surface is very smooth with the roughness of only 1.97 Å. The devices also show excellent etched uniformity with a small threshold voltage deviation of 28 mV and good electrical performance, which is useful to the heterostructure device fabrications.

• Japan Society of Applied Physicsの論文
• 2004-06-15

著者

• Wang Yeong-her

  Institute Of Microelectronics Department Of Electrical Engineering National Cheng Kung University

• Wang Yeong-her

  Institute Of Microelectronics Department Of Electrical Engineering National Cheng-kung University

• LIAO Chin-I

  Institute of Microelectronics, Department of Electrical Engineering, National Cheng-Kung University

• Houng Mau-phon

  Institute Of Microelectronics Department Of Electrical Engineering National Cheng Kung University

• Houng Mau-phon

  Institute Of Microelectronics Department Of Electrical Engineering National Cheng-kung University

• Liao Chin-i

  Institute Of Microelectronics Department Of Electrical Engineering National Cheng-kung University

• Sze Po-Wen

  Department of Electrical Engineering, Kao-Yuan Institute of Technology, Lu-Chu, Kaoshiung 821, Taiwa

• Sze Po-wen

  Department Of Electrical Engineering Kao-yuan Institute Of Technology

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