端部磁性体を配置した高周波キャリア型磁界センサの感度向上に関する研究(計測・高周波デバイス)

概要

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Improvement of the sensitivity of a high-frequency carrier-type (HFC-type) magnetic field sensor through the use of an edge extension structure is reported. The HFC-type magnetic field sensor is composed of a rectangular CoNbZr thin film with a coplanar-structure Cu thin film as an electrode. The edge extension structure causes reduction of the sensor's demagnetization field effect. A variation in the sensor impedance was obtained as a function of the external magnetic field for edge extension lengths ranging from X=0 mm to X=1 mm. The length of the sensor was 1 mm, the thickness was 2μm, and the widths were 20 and 80μm. It was demonstrated that the gain of an HFC-type magnetic sensor with an edge extension length of X=1 mm was three times higher than that of a sensor with an edge extension length of X=0 mm. This result shows that an edge extension structure improves the sensitivity of an HFC-type magnetic field sensor.
社団法人日本磁気学会の論文
2006-03-01