高異方性磁界を持つCo-Fe-B系軟磁性膜のGHz帯透磁率特性(ソフト磁性材料)

概要

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Co-Fe-B films with a thickness of 0.5 μm were fabricated by synchronous dual RF magnetron sputtering a while rotating cylindrical electrode. A magnetic thin-film core for GHz applications was obtained with a large anisotropy field H_k and large saturation magnetization 4 π M_s, and these permeability characteristics and micro-structures were investigated. The as-deposited film, with H_k of 390 Oe and 4 πM_s of 17.6 kG, exhibited high ferromagnetic resonance (FMR) frequencies of up to 6 GHz in permeability characteristics. The film has an amorphous-like structure including atomic ordering within the range of several angstroms, which leads to good soft magnetic properties with an electrical resistivity of 100 μ Ω cm. The large H_k of the films fabricated by the sputtering method is effective for attaining higher frequency characteristics with lower FMR loss.
社団法人日本磁気学会の論文
2003-04-01