高電気抵抗ヘテロアモルファス膜の異方性磁界とGHz帯高周波透磁率

概要

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(CoFeB)-(SiO_2) and CoFeB films were fabricated by synchronous triple rf magnetron sputtering while rotating a cylindrical electrode. Three types of films for rf application in the range over 1 GHz were obtained, and their permeability characteristics and microstructures were investigated. The as-deposited films exhibited large anisotropy fields H_k in the range from 40 to 550 Oe, and high ferromagnetic resonance (FMR) frequencies of 1.6-6.0 GHz in permeability characteristics. They also exhibited amorphous-like or hetero-amorphous structures, which led to good soft magnetic properties with electrical resistivities ρ of 400-100,000 μΩcm and saturation magnetizations 4πM_s of 6.5-20 kG. The larger H_k and higher resistivities obtained were effective for attaining the higher-frequency characteristics with lower losses for magnetic devices.
2004-03-01