高飽和磁化bcc-FeCo相を含む(FeCo)-(SiO_2)膜の磁気特性とGHz透磁率特性

概要

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(Fe_<82>Co_<18>HSiO_2) magnetic thin films with a bcc-FeCo crystal phase and SiO_2 amorphous phase were deposited on glass substrates using synchronous triple-RF magnetron sputtering. Magnetic properties and high-frequency permeability characteristics of the films were investigated for an MMIC (Monolithic Micro wave a Integrated Circuit) inductor core. The film exhibited large anisotropy field H_k of 200 Oe and high electrical resistivity of 1000 μΩCm caused by addition of SiO_2 into the film, and large saturation magnetization 4πM_s of 14.5 kG caused by containing bcc-FeCo crystal with its saturation magnetization more than 23 kG. Reflecting these large H_k and 4πM_s, a high resonance frequency of 4.4 GHz was obtained together with a higher relative permeability of about 100. The presented films containing bcc-FeCo crystal phase with high saturation magnetization have good potential for film inductor cores driving in the GHz frequency range.
社団法人日本磁気学会の論文
2004-07-01