高周波キャリアを用いた位相検出型薄膜磁界センサの開発

概要

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The impedance of a magnetic thin film changes when a magnetic field is applied. The high-frequency-carrier magnetic field sensor, also called a GMI sensor, employs this phenomenon as its principle. We directed our attention to the change in the phase characteristic, and measured the magnetic field by measuring the phase of the high-frequency-carrier magnetic field sensor as a phase difference. Although the high-frequency-carrier magnetic field sensor is optimized for impedance detection, it is not appropriate for measuring the magnetic field by detecting the phase difference. To improve its resolution and sensitivity in this respect, we developed an enhanced-phase-difference-detection-type magnetic field sensor. As a result, we obtained a best rate of change of 63.5 degree/Oe and a resolution of 2.6×10^<-7> Oe/Hz^<1/2>.
社団法人日本磁気学会の論文
2005-06-01