柔軟基板上に形成した磁気弾性歪センサ

概要

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Micro-strain sensors using the magnetostrictive properties of FeCeSiB films were investigated. To avoid the effects of the rigidity of the substrate on the stress sensitivity, a sensor was formed on thin polyimide ribbons (50μm thick), which have superior heat resistance, wide elastic region, and excellent flexibility. By using the large difference in the coefficient of thermal expansion between FeCoSiB and polyimide, the residual stress in the magnetostrictive FeCoSiB patterned film was controlled. The sensor was formed under optimized conditions, and had an extremely high value of the figure of merit F=(ΔZ/Z)/Δ_ε(change in film impedance Z per unit ε) of about 1500 at a carrier current frequency of 700MHz. In addition, the point of stress representing the largest sensitivity of the sensor was controlled by controlling the field annealing conditions.
社団法人日本磁気学会の論文
2001-04-15