磁歪膜を用いた歪センサのインピーダンス変化に関する検討

概要

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The strain sensor using inverse magnetostriction effect has very high sensitivity with strain. In oreder to improve the sensitivity, the study on the energy behavior of the strain sensor is very important. Therefore we fabricated the sensor with magnetostrictive film and tried to examine the relationships between magnetoelastic energy and anisotropy energy in this study. In particular, we focused on the magnetic domain change by magnetoelastic energy and Zeeman energy. Moreover, we examined impedance property of the strain sensor applied strain and magnetic property with strain. As a result, using magnetic domain change observation, we could observe the anisotropy energy change by applied magnetoelastic energy and discuss the relationships between magnetoelastic energy and anisotropy energy.
社団法人　日本磁気学会の論文