Deposition of Diamond-like Carbon Films by Pulsed-Laser Evaporation
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概要
- 論文の詳細を見る
Diamond-like carbon thin films were deposited by pulsed-laser evaporation. A carbon target was irradiated by a Xe-Cl laser with a power density of 3×10^8W/cm^2. Ions were mixed with vaporized atoms. Deposition rates were typically 200 Å/ min. Film properties changed with substrate temperature. The films deposited at 50℃ were diamond-like, as confirmed by refractive index (2.1 to 2.2), optical transparenty and chemical resistance. Hydrogen-free films were produced.Optical band gap was 1.4 eV and electrical resistivity was 10^8 Ω-cm. No crystallinity was observed.
- 社団法人応用物理学会の論文
- 1987-09-20
著者
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SATO Tetsuya
Department of Pediatrics, Kochi Medical School, Kochi University
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Iguchi Satoshi
Toyota Motor Corporation
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Iguchi Satoshi
Toyota Motor Corporation Higashifuji Technical Center
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Sato Tetsuya
Department Of Cardiology Okayama Red Cross General Hospital
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HANABUSA Mitsugu
Department of Electrical and Electronic Engineering, Toyohashi University of Technology
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FURUNO Shigeo
Toyota Motor Corporation, Higashifuji Technical Center
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Furuno Shigeo
Toyota Motor Corporation
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Furuno Shigeo
Toyota Motor Corporation Higashifuji Technical Center
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Hanabusa Mitsugu
Department Of Electrical And Electronic Engineering Toyohashi University Of Technology
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Sato Tetsuya
Department Of Electrical And Electronic Engineering Toyohashi University Of Technology
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Sato Tetsuya
Department Of Agricultural Chemistry Obihiro University Of Agriculture And Veterinary Medicine
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