Coherent Anti-Stokes Raman Spectroscopic Study of CO_2 Laser CVD of Silane
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概要
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Coherent anti-Stokes Raman spectroscopy (CARS) has been used to study gas phase processes involved in CO_2 laser chemical vapor deposition of silane. SiH_4 CARS spectrum exhibited a unique profile which was interpreted as arising from excitation of rotational levels following gas phase reactions. From N_2 CARS thermometry, the CO_2 laser beam was found to raise the temperature of the gas containing silane. Using the observed CARS results, we discuss why silicon films are deposited faster when the CO_2 laser is tuned to absorption lines of silane.
- 社団法人応用物理学会の論文
- 1983-11-20
著者
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KIKUCHI HIROSHI
Department of Cardiology, Saiseikai Kumamoto Hospital
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HANABUSA Mitsugu
Department of Electrical and Electronic Engineering, Toyohashi University of Technology
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Hanabusa Mitsugu
Department Of Electrical And Electronic Engineering Toyohashi University Of Technology
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Kikuchi Hiroshi
Department Of Electrical And Electronic Engineering Toyohashi University Of Technology
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