Dependence of Frequency and Pressure on Electron Energy Distribution Functionsin Low Pressure Plasma
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1997-07-01
著者
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Sasaki Takahiko
Institute For Materials Research(imr) Tohoku University
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TAKAHASHI Nobuaki
Department of Applied Physics, National Defense Academy
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SAMUKAWA Seiji
LSI Basic Research Laboratory, Microelectronics Research Laboratories, NEC Corporation
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Takahashi Nobuaki
Tokyo Electron Limited.
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Sasaki T
Department Of Applied Physics National Defense Academy
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AKASHI Haruaki
Department of Applied Physics, National Defense Academy
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SASAKI Tai
Department of Applied Physics, National Defense Academy
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Akashi Haruaki
Department Of Applied Physics National Defense Academy
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Samukawa Seiji
Lsi Basic Research Laboratory Microelectronics Research Laboratories Nec Corporation
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Takahashi N
Department Of Materials Science And Engineering & Frontier Research Center Graduate School Of En
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Sasaki Tsutomu
Advanced Technology Research Laboratories Nippon Steel Corporation
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Takahashi Nobuaki
Department Of Applied Physics National Defense Academy
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