Doppler-Shifted Laser-Induced Fluorescence Diagnostics of an Ultrahigh-Frequency Discharge Plasma
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概要
- 論文の詳細を見る
Ultrahigh-frequency (UHF) discharge plasma, as well as electron cyclotron resonance (ECR) plasma and inductively coupled plasma (ICP), is diagnosed in a series of measurements of metastable ion (Ar+, Cl+) and neutral (Ne) temperatures by Doppler-shifted laser-induced fluorescence. Cl+ temperature is found to be lower in UHF plasma and ICP than in ECR plasma. In UHF plasma, the ion temperature weakly depends on both pressure and power, suggesting that plasma uniformity is insensitive to these external parameters. Magnetic multipole confinement enables the production of a stable UHF plasma even at pressures below 0.13 Pa where the plasma cannot be produced without the confinement. In this pressure region, Cl+ temperature is decreased to ≈0.1 eV.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 1997-07-30
著者
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Samukawa Seiji
Lsi Basic Research Laboratory Microelectronics Research Laboratories Nec Corporation
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Nakano Toshiki
Department Of Electrical And Electronic Engineering National Defense Academy
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Nakano Toshiki
Department of Electrical Engineering, National Defense Academy,
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