Influence of As/Al and Sb/Al Gas Flow Ratios on Growth of AlAs_<1-x>Sb_x Alloys
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概要
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AlAs_<1-x>Sb_x epilayers were grown on InP (100) substrates using the metalorganic chemical vapor epitaxial growth technique. Experimental results demonstrate that the solid concentration of AlAsSb is more naturally expressed as a function of the input As/Al partial pressure ratio, and not of the V/III ratio or the Sb mole fraction in group V used during the growth. In fact, the AlAs solid concentration and the input partial pressure ratio of As to Al are proportional to each other. According to the phase diagram described above, the controllability of the solid concentration of AlAsSb could be improved.
- 社団法人応用物理学会の論文
- 1995-12-01
著者
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Ou Jehn
Department Of Electrophysics Chiao-tung University
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Chen Wei-kuo
Department Of Electrophysics Chiao-tung University
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