Behavior of Oxygen Adsorbed in Annealed Hydrogenated Amorphous Silicon
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1983-02-20
著者
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KATAYAMA Saichi
Faculty of Engineering, Kansai University
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Katayama Saichi
Faculty Of Engineering Kansai University
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Yokota Katsuhiro
Faculty Of Engineering Kansai University
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KAGEYAMA Tetsuya
Faculty of Engineering, Kansai University
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Kageyama Tetsuya
Faculty Of Engineering Kansai University
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Yokota Katsuhiro
Faculty of Engineering and High-Technology Research Center, Kansai University, Suita, Osaka 564-8680, Japan
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