Preparation of nanocrystalline soft magnetic FeAlN films for magnetic recording head (マルチメディアストレージ第6回アジア情報記録技術シンポジウム〔英文〕)

概要

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The nanocrystalline soft magnetic FeAlN films have been successfully prepared by RF reactive sputtering. The dependences of structure and magnetic properties on preparing conditions were investigated. The results show that the content of Al in films must be strictly controlled to attan high B_s. The magnetic properties strongly depend on the temperature of the substrate during deposition and good soft magnetic properties can be found in the films sputterd at T_s=120℃. With the increase of film thickness, the saturation magnetization M_s increases, In contrast to M_s the coercivity H_c decreases. In this paper the relations between magnetic changes and microstructure have been discussed.
社団法人映像情報メディア学会の論文
2001-11-08