The Effects of Target Composition on Microstructure and Magnetic Properties of Sputtered Hexagonal Ferrite Films
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概要
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M-type Strontium ferrite thin films were prepared in the mixture gases of Ar and O_2, using DC magnetron sputtering apparatus. The effects of target composition on structure and magnetic properties of the films were investigated. It is found that the films show c-axis orientation normal to the film plane, and the orientation factor (fc) has little change as the coefficient n of target composition SrO・nFe_2O_3 increases. The saturation magnetization Ms and coercivity Hc of the films have largest value of 321emu/cc and 3.4kOe at n=4, then reach a stable value of 250emu/cc and 2.2kOe with the increase of coefficient n, respectively. It indicates that the composition of the films deviates from that of the target. The film prepared by the target composition of SrO・4Fe_2O_3 approaches to the stoichiometric M-type hexagonal strontium ferrite and exhibits best hard magnetism.
- 社団法人電子情報通信学会の論文
- 1999-11-09
著者
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Xie Tain
Research Institute Of Magnetic Materials Lanzhou University
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Xie Tian
Research Institute Of Magnetic Materials Lanzhou University
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Yang Z
The Research Institute Of Magnetic Materials Lanzhou University
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Yang Zheng
Research Institute Of Magnetic Materials Lanzhou University
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Wei Fulin
Research Institute of Magnetic Materials, Lanzhou University
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Wu Dongping
Research Institute of Magnetic Materials, Lanzhou University
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MATSUMOTO Mitsunori
Department of Information Engineering, Shinshu University
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Wei Fulin
Key Lab. on magnetism, State Education Ministry
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Wei Fulin
Research Institute Of Magnetic Materials Lanzhou University
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Zheng Yang
Data Storage Institute
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Yang Zheng
Research Institute Of Magnetic Materials
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Wu Dongping
Research Institute Of Magnetic Materials Lanzhou University
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Matsumoto Mitsunori
Department Of Information Engineering Shinshu University
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Yang Zheng
Research Institute Of Magnetic And Materials Lanzhou University
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