The influence of sputtering condition on the soft magnetic properties of Fe-Ta-N films (マルチメディアストレージ--第5回アジア情報記録技術シンポジウム〔英文〕)
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概要
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The soft magnetic properties of Fe-Ta-N films are decided by grain size and lattice deformation. In high Ta content films, the grain size is smaller than 10nm, so the coercivity is decided by lattice deformation, which is increasing with the content of interstitial N atoms. The dependence of coercivity on sputtering power and total pressure can be explained well by the change of lattice deformation. The optimum soft magnetic properties migrate to high partial nitrogen pressure at high sputtering power, or to low partial nitrogen at high total pressure.
- 社団法人映像情報メディア学会の論文
- 2000-11-15
著者
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Yang Z
The Research Institute Of Magnetic Materials Lanzhou University
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Wei Fulin
Research Institute of Magnetic Materials, Lanzhou University
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Wei Fulin
Research Institute Of Magnetic Materials Lanzhou University
-
Bin Ma
Shanghai Institute Of Metallurgy
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Zheng Yang
Data Storage Institute
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Dongping Wu
Institute Of Magnetic Materials Lanzhou University
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Zheng Yang
Institute of Magnetic Materials, Lanzhou University
-
Fulin Wei
Institute of Magnetic Materials, Lanzhou University
-
Daishun Zhen
Institute of Magnetic Materials, Lanzhou University
-
Daishun Zhen
Institute Of Magnetic Materials Lanzhou University
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