Investigation of Influence of Ta and Al on soft Magnetic Behavior in Nitrogenated Iron-Based Films
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概要
- 論文の詳細を見る
Fe-Ta-N films and Fe-Al-N films with different composition were prepared by RF reactive sputtering technique, using composite targets with Ar+N_2 mixed gases. The influences of Ta and Al content, sputtering partial nitrogen pressure P(N_2) and annealing temperature T_A on structure and magnetic properties of films were investigated. It is found that the addition of Ta and Al efficiently inhibits the formation of γ-Fe_4N phase in the films. A comparison of influences of additional Ta and Al elements on structure and soft magnetic properties of Fe-N based films was made and the mechanism is discussed in this paper.
- 社団法人電子情報通信学会の論文
- 1999-11-10
著者
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Xie Tain
Research Institute Of Magnetic Materials Lanzhou University
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Xie Tian
Research Institute Of Magnetic Materials Lanzhou University
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Liu X
Research Institute Of Magnetic Materials Lanzhou University
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Liu X
Research Institute Of Magnetism And Magnetic Materials Lanzhou University
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Liu X
Lanzhou Univ. Lanzhou Chn
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Liu Xiaoxi
Research Institute Of Magnetic Materials Lanzhou University
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Liu Xiaoxi
Department Of Information Engineering Shinshu University
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Liu X
Institute Of Theoretical Physics Lanzhou University
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Yang Z
The Research Institute Of Magnetic Materials Lanzhou University
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Li Xiaohong
Research Institute Of Magnetic Materials Lanzhou University
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Yang Zheng
Research Institute Of Magnetic Materials Lanzhou University
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Wei Fulin
Research Institute of Magnetic Materials, Lanzhou University
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Zheng Daishun
Research Institute of Magnetic Materials, Lanzhou University
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Wu Dongping
Research Institute of Magnetic Materials, Lanzhou University
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MATSUMOTO Mitsunori
Department of Information Engineering, Shinshu University
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Wu Dongping
Key Lab. on magnetism, State Education Ministry
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Wei Fulin
Key Lab. on magnetism, State Education Ministry
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Yang Zheng
Key Lab. on magnetism, State Education Ministry
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ITO Kazuyaki
Department of Information Engineering, Shinshu University
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Ito Kazu
Department of Information Engineering, Shinshu University
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Wei Fulin
Research Institute Of Magnetic Materials Lanzhou University
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Ito Kazu
Department Of Information Engineering Shinshu University
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Zheng Yang
Data Storage Institute
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Wu Dongping
Research Institute Of Magnetic Materials Lanzhou University
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Zheng Daishun
Research Institute Of Magnetic Materials Lanzhou University
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Matsumoto Mitsunori
Department Of Information Engineering Shinshu University
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