Study on the Fe-Al-N soft magnetic thin films (マルチメディアストレージ--第5回アジア情報記録技術シンポジウム〔英文〕)
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概要
- 論文の詳細を見る
The Fe-Al-N films were fabricated by reactive sputtering using RF magnetron sputtering system. The influences of content of Al and N and annealing temperature on microstructure and magnetic properties were investigated. The Fe-Al-N films consist of nanocrystalline α-Fe grains and a small amount of Iron-nitrogen and Aluminum-nitrogen compound precipitate in the boundaries of α-Fe grains and suppress the growth of α-Fe grains. Annealing makes a little improvement of soft magnetic properties which due to the release of stress and perfect crystallization of α-Fe. The AFM image indicates the grains show oblate ellipsoid shape and are parallel each other. The uniaxial anisotropy of the films may be partially caused by the shape anisotropy of grains.
- 社団法人映像情報メディア学会の論文
- 2000-11-15
著者
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Xie Tain
Research Institute Of Magnetic Materials Lanzhou University
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Xie Tian
Research Institute Of Magnetic Materials Lanzhou University
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Liu X
Research Institute Of Magnetic Materials Lanzhou University
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Liu X
Research Institute Of Magnetism And Magnetic Materials Lanzhou University
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Liu X
Lanzhou Univ. Lanzhou Chn
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Liu Xiaoxi
Research Institute Of Magnetic Materials Lanzhou University
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Liu Xiaoxi
Department Of Information Engineering Shinshu University
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Liu X
Institute Of Theoretical Physics Lanzhou University
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Yang Z
The Research Institute Of Magnetic Materials Lanzhou University
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Li Xiaohong
Research Institute Of Magnetic Materials Lanzhou University
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Yang Zheng
Research Institute Of Magnetic Materials Lanzhou University
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Wei Fulin
Research Institute of Magnetic Materials, Lanzhou University
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Zheng Daishun
Research Institute of Magnetic Materials, Lanzhou University
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Wu Dongping
Research Institute of Magnetic Materials, Lanzhou University
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Wei Fulin
Research Institute Of Magnetic Materials Lanzhou University
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Wei Fulin
Research Institute Of Magnetic Materials
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Zheng Yang
Data Storage Institute
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Yang Zheng
Research Institute Of Magnetic Materials
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Wu Dongping
Research Institute Of Magnetic Materials Lanzhou University
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Zheng Daishun
Research Institute Of Magnetic Materials Lanzhou University
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Yang Zheng
Research Institute Of Magnetic And Materials Lanzhou University
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