The Influence of Sputtering Condition on the Soft Magnetic Properties of Fe-Ta-N Films

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概要

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• The soft magnetic propertes of Fe-Ta-N films are decided by grain size and lattice deformation. In high Ta content films, the grain size is smaller than 10 nm, so the coercivity is decided by lattice deformation, which is increasing with the content of interstitial N atoms. The dependence of coercivity on sputtering power and total pressure can be explained well by the change of lattice deformation. The optimum soft magnetic properties migrate to high partial nitrogen pressure at high sputtering power, or to low partial nitrogen at high total pressure.

• 社団法人電子情報通信学会の論文
• 2000-11-08

著者

• Yang Z

  The Research Institute Of Magnetic Materials Lanzhou University

• Wei Fulin

  Research Institute of Magnetic Materials, Lanzhou University

• Wei Fulin

  Research Institute Of Magnetic Materials Lanzhou University

• Bin Ma

  Shanghai Institute Of Metallurgy

• Zheng Yang

  Data Storage Institute

• Dongping Wu

  Institute Of Magnetic Materials Lanzhou University

• Zheng Yang

  Institute of Magnetic Materials, Lanzhou University

• Fulin Wei

  Institute of Magnetic Materials, Lanzhou University

• Daishun Zhen

  Institute of Magnetic Materials, Lanzhou University

• Daishun Zhen

  Institute Of Magnetic Materials Lanzhou University

• Ma Bin

  Shanghai Institute of Metallurgy

• Yang Zheng

  Institute of Magnetic Materials, Lanzhou University

• Wei Fulin

  Institute of Magnetic Materials, Lanzhou University

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