Study on The Fe-Al-N Soft Magnetic Thin Films

概要

論文の詳細を見る
The Fe-Al-N films were fabricated by reactive sputtering using RF magnetron sputtering system. The influences of content of Al and N and annealing temperature on microstructure and magnetic properties were investigated. The Fe-Al-N films consist of nanocrystalline α-Fe grains and a small amount of Iron-nitrogen and Aluminum-nitrogen compound precipitate in the boundaries of α-Fe grains and suppress the growth of α-Fe grains. Annealing makes a little improvement of soft magnetic propertes which due to the release of stress and perfect crystallization of α-Fe. The AFM image indicates the grains show oblate ellipsoid shape and are parallel each other. The uniaxial anisotropy of the films may be partially caused by the shape anisotropy of grains.
社団法人電子情報通信学会の論文
2000-11-08